8 papers · 1 filter
Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
Alexander V. Khrabrov, Igor D. Kaganovich
In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes…
Laser ion acceleration from concave targets by subpicosecond pulses
K. V. Lezhnin, V. Ospina-Bohórquez, J. Griff-McMahon +6
Laser-driven proton acceleration provides a powerful route for generating ultrashort, high-charge proton beams. Many applications, including secondary neutron sources and inertial…
Partially Ionized Plasma Physics and Technological Applications
Igor Kaganovich, Michael Tendler
Partially ionized plasma physics has attracted a lot of attention recently due to numerous technological applications made possible by the increased sophistication of computer mode…
Particle-In-Cell Informed Kinetic Modeling of Nonlinear Skin Effects in Low-Frequency Inductively Coupled Plasmas
Haomin Sun, Jian Chen, Alexander Khrabrov +4
We perform extensive 2D Particle-In-Cell (PIC) electromagnetic simulations of low pressure Inductively Coupled Plasma (ICP) discharges with various coil current and driving frequen…
Sheath electron heating in surface wave discharges driven at microwave frequencies
Denis Eremin, Andrew T. Powis, Igor D. Kaganovich
Using fully electromagnetic particle-in-cell/Monte Carlo simulations, the electron heating due to interaction with a moving sheath is demonstrated to dominate in surface wave-drive…
Nonlinear skin effect regime when a radio frequency electromagnetic field penetrates into a background plasma
Haomin Sun, Jian Chen, Alexander Khrabrov +4
Two-dimensional, electromagnetic particle-in-cell simulations are employed to study particle kinetics and power deposition in the skin layer when a Radio Frequency (RF) electromagn…