8 citations · 13 across the 13 of their papers we have counts for
13 papers
Superconducting properties of NbSc film deposited by magnetron co-sputtering
Paul Berezhnoy, Anna Elistratova, Zakhar Enbaev +8
The technology has been developed for synthesizing NbSc films using magnetron co-sputtering from Nb and Sc targets. The material synthesis was accompanied by structural…
4-Pixel NbN Hot-Electron Bolometer Integrated in a SiN Planar Optical Waveguide with On-Chip Fiber-Alignment Trench
N. A. Vovk, G. A. Matveev, M. A. Mumlyakov +7
In this work, we design and characterize a 4-pixel superconducting hot-electron bolometer (HEB) based on niobium nitride (NbN), integrated with individual planar silicon nitride (S…
Control of thin NbN film superconducting properties by ScN buffer layer
N. V. Porokhov, M. A. Dryazgov, A. R. Shevchenko +7
This work investigates the effect of a scandium nitride buffer layer on the superconducting properties of niobium nitride thin films. The use of a ScN buffer layer significantly im…
Silicon nitride on-chip C-band spontaneous emission generation based on lanthanide doped microparticles
Dmitry V. Obydennov, Ilya M. Asharchuk, Alexander M. Mumlyakov +5
The integration of active light-emitting elements into planar photonic circuits on a silicon nitride platform remains challenging due to material incompatibilities and high-tempera…
Practical way to increase nonlinearity of kinetic inductance of superconductor
Yu. P. Korneeva, M. A. Dryazgov, I. V. Trofimov +7
This work demonstrates that depositing a thin layer of Mo (5-15 nm) onto a 10 nm thick NbN strip leads to a significant increase in the nonlinearity of the kinetic inductance …
Effect of Etching Methods on Dielectric Losses in Transmons
T. A. Chudakova, G. S. Mazhorin, I. V. Trofimov +9
Superconducting qubits are considered as a promising platform for implementing a fault tolerant quantum computing. However, surface defects of superconductors and the substrate lea…
Technology of fabrication superconducting free-standing structures (FSS)
M. A. Tarkhov, A. M. Mumlyakov, M. V. Shibalov +5
In this study, a method for fabrication of superconducting microstructures that are partially or completely isolated from the substrate has been proposed. Two configurations of sus…
Influence ScN protective thin layer on the superconducting properties of ultrathin NbN films
N. V. Porokhov, A. A. Anikanov, A. P. Sirotina +8
The present study delves into exploring the impact of a thin protective layer of scandium nitride (ScN) on the superconductive properties of thin films of niobium nitride (NbN) gen…
Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber
Maksim V. Shibalov, Ilya M. Asharchuk, Evgeniy O. Epifanov +5
This paper presents the development of a superconducting nanowire single-photon detector (SNSPD) integrated into a distributed Bragg reflector (DBR) with a design center wavelength…
Superconducting TSV contact for cryoelectronic devices
Ivan Filippov, Alexandr Anikanov, Aleksandr Rykov +6
This work focuses on the fabrication of niobium through silicon vias (TSV) superconductors interconnects. The effect of supercycle of sequential oxidation and chemical etching proc…
Enchanced reflectance SiN / SiO DBR mirror based on TEOS precursor fabricated by PECVD method
I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov +6
In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH) and the silicon-organic precursor tetraethoxysilane (TE…
Wet Scandium Etching for hard mask formation on a silicon substrate
Julia Bondareva, Ekaterina Timofeeva, Alexandr Anikanov +6
Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of t…
Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer
N. V. Porokhov, A. P. Sirotina, E. A. Pershina +9
The influence of the buffer layer of hafnia dielectric on superconducting properties of niobium nitride films, produced by the technique of the reactive magnetron depositing has be…