8 citations · 13 across the 13 of their papers we have counts for
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Enchanced reflectance SiN / SiO DBR mirror based on TEOS precursor fabricated by PECVD method
I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov +6
In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH) and the silicon-organic precursor tetraethoxysilane (TE…
Wet Scandium Etching for hard mask formation on a silicon substrate
Julia Bondareva, Ekaterina Timofeeva, Alexandr Anikanov +6
Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of t…
Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer
N. V. Porokhov, A. P. Sirotina, E. A. Pershina +9
The influence of the buffer layer of hafnia dielectric on superconducting properties of niobium nitride films, produced by the technique of the reactive magnetron depositing has be…