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physics.optics2025
Silicon nitride on-chip C-band spontaneous emission generation based on lanthanide doped microparticles
Dmitry V. Obydennov, Ilya M. Asharchuk, Alexander M. Mumlyakov +5
The integration of active light-emitting elements into planar photonic circuits on a silicon nitride platform remains challenging due to material incompatibilities and high-tempera…
physics.optics2021
Enchanced reflectance SiN / SiO DBR mirror based on TEOS precursor fabricated by PECVD method
I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov +6
In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH) and the silicon-organic precursor tetraethoxysilane (TE…