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cond-mat.supr-con2023
Development of Self-Shunted Josephson Junctions For a Ten-Superconductor-Layer Fabrication Process: Nb/NbN/Nb Junctions
Sergey K. Tolpygo, Ravi Rastogi, Terence Weir +2
To increase integration scale of superconductor electronics, we are developing a new, SFQ7ee, node of the fabrication process at MIT Lincoln Laboratory. In comparison to the existi…
cond-mat.supr-con2023★ 27 cited
Progress toward superconductor electronics fabrication process with planarized NbN and NbN/Nb layers
Sergey K. Tolpygo, Justin L. Mallek, Vladimir Bolkhovsky +5
To increase density of superconductor digital and neuromorphic circuits by 10x and reach integration scale of Josephson junctions (JJs) per chip, we developed a new fabricat…