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20112025
most citedAdvanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits

253 citations · 788 across the 16 of their papers we have counts for

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cond-mat.supr-con2012★ 1 cited

Shadow evaporation of epitaxial Al/Al2O3/Al tunnel junctions on sapphire utilizing an inorganic bilayer mask

Paul B. Welander, Vladimir Bolkhovsky, Terence J. Weir +2

This letter describes a new inorganic shadow mask that has been employed for the evaporation of all-epitaxial Al/Al2O3/Al superconducting tunnel junctions. Organic resists that are…