Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors

Abstract

We present the use of grounding airbridge arrays to trim the frequency of microwave coplanar-waveguide (CPW) resonators post fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with $100\mathrm{MHz}$ range and $10\mathrm{MHz}$ resolution. We showcase two applications in circuit QED. The first is elimination of frequency crowding between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.

arXiv comment8 pages and 6 figures

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Cited by in corpus (8)

• Fast multiplexed superconducting qubit readout with intrinsic Purcell filtering
• Alternating Bias Assisted Annealing of Amorphous Oxide Tunnel Junctions
• Wafer-scale uniformity of Dolan-bridge and bridgeless Manhattan-style Josephson junctions for superconducting quantum processors
• Reducing the error rate of a superconducting logical qubit using analog readout information
• Generation of Frequency-Tunable Shaped Single Microwave Photons Using a Fixed-Frequency Superconducting Qubit
• Niobium Air Bridges as Low-Loss Components for Superconducting Quantum Hardware
• Optimizing the frequency positioning of tunable couplers in a circuit QED processor to mitigate spectator effects on quantum operations
• Deterministic Quantum Communication Between Fixed-Frequency Superconducting Qubits via Broadband Resonators