Fabrication of high-quality PMMA/SiO${}_x$ spaced planar microcavities for strong coupling of light with monolayer WS${}_2$ excitons

Abstract

Exciton polaritons in atomically-thin transition metal dichalcogenide crystals (monolayer TMDCs) have emerged as a promising candidate to enable topological transport, ultra-efficient laser technologies, and collective quantum phenomena such as polariton condensation and superfluidity at room temperature. However, integrating monolayer TMDCs into high-quality planar microcavities to achieve the required strong coupling between the cavity photons and the TMDC excitons (bound electron-hole pairs) has proven challenging. Previous approaches to integration had to compromise between various adverse effects on the strength of light-matter interactions in the monolayer, the cavity photon lifetime, and the lateral size of the microcavity. Here, we demonstrate a scalable approach to fabricating high-quality planar microcavities with an integrated monolayer WS${}_2$ layer-by-layer by using polymethyl methacrylate/silicon oxide (PMMA/SiO${}_x$) as a cavity spacer. Because the exciton oscillator strength is well protected against the required processing steps by the PMMA layer, the microcavities investigated in this work, which have quality factors of above $10^3$, can operate in the strong light-matter coupling regime at room temperature. This is an important step towards fabricating wafer-scale and patterned microcavities for engineering the exciton-polariton potential landscape, which is essential for enabling many proposed technologies.

References in corpus (34)

• Atomically thin MoS2: A new direct-gap semiconductor
• Observation of tightly bound trions in monolayer MoS2
• Measurement of the optical dielectric function of transition metal dichalcogenide monolayers: MoS2, MoSe2, WS2 and WSe2
• Strong light-matter coupling in two-dimensional atomic crystals
• Optical signature of symmetry variations and spin-valley coupling in atomically thin tungsten dichalcogenides
• Observation of Superfluidity of Polaritons in Semiconductor Microcavities
• Experimental demonstration of continuous electronic structure tuning via strain in atomically thin MoS2
• Exciton physics and device application of two-dimensional transition metal dichalcogenide semiconductors
• Exciton Binding Energy of Monolayer WS2
• Observation of non-Hermitian degeneracies in a chaotic exciton-polariton billiard
• Fermi polaron-polaritons in charge-tunable atomically thin semiconductors
• Exciton-polariton topological insulator
• Room Temperature Polariton Lasing in All-Inorganic Perovskites
• Room-temperature superfluidity in a polariton condensate
• Two-dimensional semiconductors in the regime of strong light-matter coupling
• Room temperature Tamm-Plasmon Exciton-Polaritons with a WSe2 monolayer
• Valley-Polarized Exciton-Polaritons in a Monolayer Semiconductor
• An exciton-polariton laser based on biologically produced fluorescent protein
• A Room Temperature Polariton Light-Emitting Diode Based on Monolayer WS2
• Ultralow Threshold Polariton Condensate in a Monolayer Semiconductor Microcavity at Room Temperature
• Optical valley Hall effect for highly valley-coherent exciton-polaritons in an atomically thin semiconductor
• Bosonic condensation of exciton-polaritons in an atomically thin crystal
• Impact of strain on the excitonic linewidth in transition metal dichalcogenides
• Motional narrowing, ballistic transport, and trapping of room-temperature exciton polaritons in an atomically-thin semiconductor
• Observation of bosonic condensation in a hybrid monolayer MoSe2-GaAs microcavity
• Room temperature topological polariton laser in an organic lattice
• Monolayer MoSe2: A candidate for room temperature polaritonics
• Spatial coherence of room-temperature monolayer WSe${}_2$ exciton-polaritons in a trap
• Observation of hybrid Tamm-plasmon exciton-polaritons with GaAs quantum wells and a MoSe2 monolayer
• Valley polarized relaxation and upconversion luminescence from Tamm-Plasmon Trion-Polaritons with a MoSe2 monolayer
• Micro- Mechanical assembly of high-quality Fabry-Perot microcavities for the integration with two-dimensional materials
• Valley polarization of exciton-polaritons in monolayer WSe2 in a tunable microcavity
• Effects of Dielectric Stoichiometry on the Photoluminescence Properties of Encapsulated WSe2 Monolayers
• Influence of direct deposition of dielectric materials on the optical response of monolayer WS${}_2$

Cited by in corpus (1)

• Negative-mass exciton polaritons induced by dissipative light-matter coupling in an atomically thin semiconductor