Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators

Abstract

We characterize niobium nitride (NbN) $\lambda /2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films grown at 120°C we report a superconducting critical temperature of 7.4K associated with a normal square resistance of 1k$\Omega$ leading to a kinetic inductance of 192pH/$\square$. We fabricated resonators with a characteristic impedance up to 4.1k$\Omega$ and internal quality factors $Q_{\mathrm{i}}>10^4$ in the single photon regime at zero magnetic field. Moreover, in the many photons regime, the resonators present high magnetic field resilience with $Q_{\mathrm{i}}>10^4$ in a 6T in-plane magnetic field as well as in a 300mT out-of-plane magnetic field. These findings make such resonators a compelling choice for cQED experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.

References in corpus (7)

• A widely tunable parametric amplifier based on a SQUID array resonator
• Implementation of low-loss superinductances for quantum circuits
• Strong Coupling Cavity QED with Gate-Defined Double Quantum Dots Enabled by a High Impedance Resonator
• Quantum Superinductor with Tunable Non-Linearity
• Direct cavity detection of Majorana pairs
• Low-Loss Superconducting Nanowire Circuits Using a Neon Focused Ion Beam
• Improving superconducting resonators in magnetic fields by reduced field-focussing and engineered flux screening

Cited by in corpus (1)

• Magnetic field robust high quality factor NbTiN superconducting microwave resonators