Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators

Cécile Xinqing Yu, Simon Zihlmann, Gonzalo Troncoso Fernández-Bada +4

We characterize niobium nitride (NbN) $\lambda /2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films gr…