Ultrahigh-Q AlGaAs-on-insulator microresonators for integrated nonlinear photonics

Abstract

Aluminum gallium arsenide (AlGaAs) and related III-V semiconductors have excellent optoelectronic properties. They also possess strong material nonlinearity as well as high refractive indices. In view of these properties, AlGaAs is a promising candidate for integrated photonics, including both linear and nonlinear devices, passive and active devices, and associated applications. For integrated photonics low propagation loss is essential, particularly in nonlinear applications. However, achieving low-loss and high-confinement AlGaAs photonic integrated circuits poses a challenge. Here we show an effective reduction of surface-roughness-induced scattering loss in fully etched high-confinement AlGaAs-on-insulator nanowaveguides, by using a heterogeneous wafer-bonding approach and optimizing fabrication techniques. We demonstrate ultrahigh-quality AlGaAs microring resonators and realize quality factors up to 3.52E6 and finesses as high as 1.4E4. We also show ultra-efficient frequency comb generations in those resonators and achieve record-low threshold powers on the order of ~20 uW and ~120 uW for the resonators with 1 THz and 90 GHz free-spectral ranges, respectively. Our result paves the way for the implementation of AlGaAs as a novel integrated material platform specifically for nonlinear photonics, and opens a new window for chip-based efficiency-demanding practical applications.

arXiv comment19 pages

References in corpus (13)

• Broadband electro-optic frequency comb generation in an integrated microring resonator
• Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator
• Fully integrated ultra-low power Kerr comb generation
• Ultrahigh-efficiency second-harmonic generation in nanophotonic PPLN waveguides
• Breaking the Loss Limitation of On-chip High-confinement Resonators
• Ultra-efficient frequency comb generation in AlGaAs-on-insulator microresonators
• AlGaAs-On-Insulator Nonlinear Photonics
• Probing the loss origins of ultra-smooth $\mathrm{S}{\mathrm{i}}_3{\mathrm{N}}_4$ integrated photonic waveguides
• Bridging ultra-high-Q devices and photonic circuits
• Ultralow-power chip-based soliton microcombs for photonic integration
• Dissipative Kerr Solitons in a III-V Microresonator
• Efficient second harmonic generation in nanophotonic GaAs-on-insulator waveguides
• Low-power continuous-wave four-wave mixing wavelength conversion in AlGaAs-nanowaveguide microresonators

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• InGaP quantum nanophotonic integrated circuits with 1.5% nonlinearity-to-loss ratio
• Strong nanophotonic quantum squeezing exceeding 3.5 dB in a foundry-compatible Kerr microresonator
• Mixing second and third-order nonlinear interactions in nanophotonic lithium-niobate waveguides
• Expanding the Quantum Photonic Toolbox in AlGaAsOI
• Quantifying and mitigating optical surface loss in suspended GaAs photonic integrated circuits
• Roadmap on Integrated Quantum Photonics
• Single-photon nonlinearities and blockade from a strongly driven photonic molecule