Dielectric particle lofting from dielectric substrate exposed to low energy electron beam
arXiv:2001.07992 · doi:10.1088/1361-6595/aba58b
Abstract
The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low energy electron beam. The article discusses the electron accumulation between such a substrate and a particle lying on it, that can cause a particle lofting. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration and the explanation of the dust levitation.
5 pages, 5 figures