14 citations · 15 across the 2 of their papers we have counts for
2 papers
physics.app-ph2020★ 14 cited
Dielectric particle lofting from dielectric substrate exposed to low energy electron beam
P. V. Krainov, V. V. Ivanov, D. I. Astakhov +4
The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low energy electron beam. The article dis…
physics.plasm-ph2015★ 1 cited
Numerical and experimental studies of the carbon etching in EUV-induced plasma
D. I. Astakhov, W. J. Goedheer, C. J. Lee +6
We have used a combination of numerical modeling and experiments to study carbon etching in the presence of a hydrogen plasma. We model the evolution of a low density EUV-induced p…