The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgrade

Abstract

Two different depleted monolithic CMOS active pixel sensor (DMAPS) prototypes with a fully synchronous column-drain read-out architecture were designed and tested: LF-Monopix and TJ-Monopix. These chips are part of a R&D effort towards a suitable implementation of a CMOS DMAPS for the HL-LHC ATLAS Inner Tracker. LF-Monopix was developed using a 150nm CMOS process on a highly resistive substrate (>2 k$\Omega$cm), while TJ-Monopix was fabricated using a modified 180 nm CMOS process with a 1 k$\Omega$cm epi-layer for depletion. The chips differ in their front-end design, biasing scheme, pixel pitch, dimensions of the collecting electrode relative to the pixel size (large and small electrode design, respectively) and the placement of read-out electronics within such electrode. Both chips were operational after thinning down to 100 $\mu$m and additional back-side processing in LF-Monopix for total bulk depletion. The results in this work include measurements of their leakage current, noise, threshold dispersion, response to minimum ionizing particles and efficiency in test beam campaigns. In addition, the outcome from measurements after irradiation with neutrons up to a dose of $1\times 10^{15}{{\mathrm{n}}_{\mathrm{eq}}/cm}^2$ and its implications for future designs are discussed.

arXiv commentProceedings of the PIXEL 2018 Workshop

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Cited by in corpus (8)

• Mini-MALTA: Radiation hard pixel designs for small-electrode monolithic CMOS sensors for the High Luminosity LHC
• Radiation hard DMAPS pixel sensors in 150nm CMOS technology for operation at LHC
• DMAPS Monopix developments in large and small electrode designs
• MALTA-Cz: A radiation hard full-size monolithic CMOS sensor with small electrodes on high-resistivity Czochralski substrate
• Performance of the MALTA Telescope
• CACTUS: A depleted monolithic active timing sensor using a CMOS radiation hard technology
• Radiation tolerant, thin, passive CMOS sensors read out with the RD53A chip
• A Triplet Track Trigger for the FCC-hh to improve the measurement of Di-Higgs production and the Higgs self-coupling