Experimental realization of on-chip topological nanoelectromechanical metamaterials

Abstract

Topological mechanical metamaterials translate condensed matter phenomena, like non-reciprocity and robustness to defects, into classical platforms. At small scales, topological nanoelectromechanical metamaterials (NEMM) can enable the realization of on-chip acoustic components, like unidirectional waveguides and compact delay-lines for mobile devices. Here, we report the experimental realization of NEMM phononic topological insulators, consisting of two-dimensional arrays of free-standing silicon nitride (SiN) nanomembranes that operate at high frequencies (10-20 MHz). We experimentally demonstrate the presence of edge states, by characterizing their localization and Dirac cone-like frequency dispersion. Our topological waveguides also exhibit robustness to waveguide distortions and pseudospin-dependent transport. The suggested devices open wide opportunities to develop functional acoustic systems for high-frequency signal processing applications.

References in corpus (22)

• Topological Insulators
• Quantum Spin Hall Effect and Topological Phase Transition in HgTe Quantum Wells
• Scheme to Achieve Silicon Topological Photonics
• Acoustic topological insulator and robust one-way sound transport
• Observation of phononic helical edge states in a mechanical 'topological insulator'
• Observation of a phononic quadrupole topological insulator
• Observation of topological valley transport of sound in sonic crystals
• Topological mechanics of gyroscopic metamaterials
• Optical detection of radio waves through a nanomechanical transducer
• Topological negative refraction of surface acoustic waves in a Weyl phononic crystal
• Coherent phonon manipulation in coupled mechanical resonators
• Amorphous topological insulators constructed from random point sets
• Graphene mechanical oscillators with tunable frequency
• Crystalline metamaterials for topological properties at subwavelength scales
• Designing Perturbative Metamaterials from Discrete Models: From Veselago lenses to topological insulators
• Coherent control of a nanomechanical two-level system
• Tunable phonon cavity coupling in graphene membranes
• Phononic crystal waveguides for electromechanical circuits
• Pseudomagnetic fields for sound at the nanoscale
• Snowflake Topological Insulator for Sound Waves
• Nonlinear nano-electromechanical lattices for high-frequency, tunable stress propagation
• On-chip phononic time lens

Cited by in corpus (62)

• Topological active matter
• Phononic bandgap nano-acoustic cavity with ultralong phonon lifetime
• Tailoring Structure-borne Sound Through Bandgap Engineering in Phononic Crystals and Metamaterials: A Comprehensive Review
• Mesoscopic physics of nanomechanical systems
• Computation and data driven discovery of topological phononic materials
• Gradient index phononic crystals and metamaterials
• Experimental Observation of Efficient Nonreciprocal Mode Transitions via Spatiotemporally-Modulated Acoustic Metamaterials
• Observation of Gigahertz Topological Valley Hall Effect in Nanoelectromechanical Phononic Crystals
• Acoustic spin-Chern insulator induced by synthetic spin-orbit coupling with spin conservation breaking
• Acoustic square-root topological insulators
• Topological dislocation modes in three-dimensional acoustic topological insulators
• On-chip higher-order topological micromechanical metamaterials
• Novel topological beam-splitting in photonic crystals
• 3D hinge transport in acoustic higher-order topological insulators
• Nanomechanical topological insulators with an auxiliary orbital degree of freedom
• Critical couplings in topological-insulator waveguide-resonator systems observed in elastic waves
• Computation of topological phase diagram of disordered Pb${}_{1-x}$Sn${}_x$Te using the kernel polynomial method
• Elastic Valley Spin Controlled Chiral Coupling in Topological Valley Phononic Crystals
• Three-dimensional higher-order topological acoustic system with multidimensional topological states
• Symmetry Breaking Creates Electro-Momentum Coupling in Piezoelectric Metamaterials
• Nonreciprocal topological phononics in optomechanical arrays
• Topological materials for full-vector elastic waves
• Strong Strain-Induced Coupling between Nanomechanical Pillar Resonators
• Adiabatic edge-to-edge transformations in time-modulated elastic lattices and non-Hermitian shortcuts
• Experimental realization of topological on-chip acoustic tweezers
• Topological elasticity of flexible structures
• Higher-order topological spin Hall effect of sound
• Edge states and corner modes in second-order topological phononic crystal plates
• Rapid Exploration of Topological Band Structures using Deep Learning
• Perfect coherent transfer in an on-chip reconfigurable nanoelectromechanical network
• Absence of topological protection of the interface states in ${\mathbb{Z}}_2$ photonic crystals
• Double Dirac Cones and Topologically Non-Trivial Phonons for Continuous, Square Symmetric (C${}_{4v}$ and C${}_{2v}$) Unit Cells
• Propagation and imaging of mechanical waves in a highly-stressed single-mode phononic waveguide
• Tailored Topological Edge Waves via Chiral Hierarchical Metamaterials
• Polarization-dependent and Valley-protected Lamb Waves in Asymmetric Pillared Phononic Crystals
• Observing polarization patterns in the collective motion of nanomechanical arrays
• On-chip unidirectional waveguiding for surface acoustic waves along a defect line in a triangular lattice
• Tunable three-way valley Hall energy-splitter: venturing beyond graphene-like structures
• A soft-clamped topological waveguide for phonons
• Instabilities near ultrastrong coupling in microwave optomechanical cavity
• Non-volatile rewritable frequency tuning of a nanoelectromechanical resonator using photoinduced doping
• Tunnelling of transverse acoustic waves on a silicon chip
• Tunneling in the Brillouin Zone: Theory of Backscattering in Valley Hall Edge Channels
• Observation of Dual-band Topological Corner Modes in Acoustic Kagome Lattice with Long-range Interactions
• Non-singular and singular flat bands in tunable acoustic metamaterials
• Selectable diffusion direction with topologically protected edge modes
• Realization of programmable nanomechanical lattice with both nearest-neighboring and next-nearest-neighboring couplings
• Geometric control of topological dynamics in a singing saw
• Soft topological modes protected by symmetry in rigid mechanical metamaterials
• Locally Resonant Metagrating by Elastic Impedance Modulation
• High-resolution acoustic field mapping of GHz phononic crystals with atomic force microscopy
• Electrically-tunable graphene nanomechanical resonators
• Strong and Weak Three-Dimensional Topological Insulators Probed by Surface Science Methods
• Dimensional hierarchy of topological bound states in the continuum
• Towards tunable graphene phononic crystals
• Optomechanics for quantum technologies
• Boundary-induced helical bulk acoustic transport in LiNbO3 thin films
• Graded phononic metamaterials: Scalable design meets scalable microfabrication
• Characterization and optimized engineering of bosonic quantum interfaces under single-mode operational constraints
• Quadrature skyrmions in two-dimensionally arrayed parametric resonators
• Microscale architected materials for elastic wave guiding: Fabrication and dynamic characterization across length and time scales
• Topological Lattice Metamaterials -- A Platform For Novel Electromagnetic Material Design Based On An Artificial Topological "Atom"