Gallium nitride L3 photonic crystal cavities with an average quality factor of 16,900 in the near infrared

Abstract

Photonic crystal point-defect cavities were fabricated in a GaN free-standing photonic crystal slab. The cavities are based on the popular L3 design, which was optimized using an automated process based on a genetic algorithm, in order to maximize the quality factor. Optical characterization of several individual cavity replicas resulted in an average unloaded quality factor Q = 16,900 at the resonant wavelength λ $\sim 1.3$ μm, with a maximal measured Q value of 22,500. The statistics of both the quality factor and the resonant wavelength are well explained by first-principles simulations including fabrication disorder and background optical absorption.

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References in corpus (4)

• Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics
• Photonic-crystal slabs with a triangular lattice of triangular holes investigated using a guided-mode expansion method
• High-Q aluminum nitride photonic crystal nanobeam cavities
• Effect of hole-shape irregularities on photonic crystal waveguides

Cited by in corpus (3)

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