High-Q aluminum nitride photonic crystal nanobeam cavities

Abstract

We demonstrate high optical quality factors in aluminum nitride (AlN) photonic crystal nanobeam cavities. Suspended AlN photonic crystal nanobeams are fabricated in sputter-deposited AlN-on-insulator substrates using a self-protecting release process. Employing one-dimensional photonic crystal cavities coupled to integrated optical circuits we measure quality factors up to 146,000. By varying the waveguide-cavity coupling gap, extinction ratios in excess of 15 dB are obtained. Our results open the door for integrated photonic bandgap structures made from a low loss, wide-transparency, nonlinear optical material system.

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• High Quality factor photonic crystal nanobeam cavities
• Linear and nonlinear optical spectroscopy of a strongly-coupled microdisk-quantum dot system
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• Multimode nanobeam cavities for nonlinear optics: high quality resonances separated by an octave
• Demonstration of mid-infrared waveguide photonic crystal cavities
• Fundamental thermal noise limits for optical microcavities
• Gallium nitride L3 photonic crystal cavities with an average quality factor of 16,900 in the near infrared
• Enhanced photon-phonon coupling via dimerization in one-dimensional optomechanical crystals
• Q factor limitation at short wavelength (around 300 nm) in III-nitride-on-silicon photonic crystal cavities