Integrated high frequency aluminum nitride optomechanical resonators
arXiv:1204.4203 · doi:10.1063/1.4707898
Abstract
Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offer low optical and mechanical loss. Integrated AlN microring resonators in the shape of suspended rings exhibit high optical quality factor (Q) with loaded Q up to 125,000. Optomechanical transduction of the Brownian motion of a GHz contour mode yields a displacement sensitivity of 6.2\times10^(-18)m/Hz^(1/2) in ambient air.
References in corpus (4)
Cited by in corpus (14)
- Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics
- Precision measurement of charge number with optomechanically induced transparency
- Cavity optomechanical transduction sensing of single molecules
- Nonlinear Quantum Optomechanics via Individual Intrinsic Two-Level Defects
- Diamond Integrated Optomechanical Circuits
- Realizing > 300,000 in diamond microdisks for optomechanics via etch optimization
- Diamond as a material for monolithically integrated optical and optomechanical devices
- Cavity optomechanics in gallium phosphide microdisks
- Cavity piezooptomechanics: piezoelectrically excited, optically transduced optomechanical resonators
- Real-time Electrical Tuning of an Optical Spring on a Monolithically Integrated Ultrahigh Q Lithium Nibote Microresonator
- Phase noise of self-sustained optomechanical oscillators
- Quantum acousto-optic transducer for superconducting qubits
- Phase sensitive imaging of 10 GHz vibrations in an AlN microdisk resonator
- Feedback and harmonic locking of slot-type optomechanical oscillators to external low-noise reference clocks