Demonstration of mid-infrared waveguide photonic crystal cavities

Abstract

We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass on CaF2 substrates by combing photolithographic patterning and focus ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 μm wavelength, and a loaded quality factor of ~ 2,000 was measured near the critical coupling regime.

4 pages, 5 figures

References in corpus (5)

• High Quality factor photonic crystal nanobeam cavities
• Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities
• Photonic Crystal Nanobeam Cavity Strongly Coupled to the Feeding Waveguide
• High-Q aluminum nitride photonic crystal nanobeam cavities
• A study of thermally-induced optical bistability and the role of surface treatments in Si-based mid-infrared photonic crystal cavities

Cited by in corpus (2)

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