Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology

Abstract

The creation of nitrogen-vacancy centres in diamond is nowadays well controlled using nitrogen implantation and annealing. Although the high-resolution placement of NV centres has been demonstrated using either collimation through pierced AFM tips or masks with apertures made by electron beam lithography, a targeted implantation into pre-defined structures in diamond may not be achieved using these techniques. We show that a beam of nitrogen ions can be focused to approximately 100 nm using focused ion beam (FIB) technology. The nitrogen ion beam is produced using an electron cyclotron resonance (ECR) plasma source. Combined with a scanning electron microscope, the nitrogen-FIB offers new possibilities for the targeted creation of single defects in diamond. This maskless technology is suitable for example for the creation of optical centres in the cavities of photonic crystals or in diamond tips for scanning magnetometry. Finally, we further show that by changing the gas source from nitrogen to xenon, standard FIB milling capabilities are also available within the same tool.

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Cited by in corpus (24)

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• Single-molecule Scale Magnetic Resonance Spectroscopy using Nitrogen-Vacancy Centers in Diamond
• Diamond surface engineering for molecular sensing with nitrogen-vacancy centers
• A silicon-based surface code quantum computer
• Scalable fabrication of single silicon vacancy defect arrays in silicon carbide using focused ion beam
• Nanoimplantation and Purcell enhancement of single NV centers in photonic crystal cavities in diamond
• Nanoscale Sensing Using Point Defects in Single-Crystal Diamond: Recent Progress on Nitrogen Vacancy Center-Based Sensors
• Quantum micro-nano devices fabricated in diamond by femtosecond laser and ion irradiation
• Deterministically Fabricated Solid-State Quantum-Light Sources
• Three-dimensional solid-state qubit arrays with long-lived spin coherence
• Spin-defect characteristics of single sulfur vacancies in monolayer ${\text{MoS}}_2$
• Highly-tunable formation of nitrogen-vacancy centers via ion implantation
• Spin Measurements of NV Centers Coupled to a Photonic Crystal Cavity
• Fabrication of quantum emitters in aluminium nitride by Al-ion implantation and thermal annealing
• Imaging the Meissner Effect and Flux Trapping of Superconductors under High Pressure using N-V Centers
• Quantum Nanophotonics with Group IV defects in Diamond
• Determining the position of a single spin relative to a metallic nanowire
• Scalable, nanoscale positioning of highly coherent color centers in prefabricated diamond nanostructures
• Review Article: Quantum Nanophotonics in Diamond
• Local nanoscale probing of electron spins using NV centers in diamond