most citedReduced etch lag and high aspect ratios by deep reactive ion etching (DRIE)

53 citations

5 papers

physics.app-ph2022★ 13 cited

Strain sensitive flexible magnetoelectric ceramic nanocomposites

Minsoo Kim, Donghoon Kim, Buse Aktas +5

Advanced flexible electronics and soft robotics require the development and implementation of flexible functional materials. Magnetoelectric (ME) oxide materials can convert magnet…

cs.RO2022★ 53 cited

Programmable Control of Ultrasound Swarmbots through Reinforcement Learning

Matthijs Schrage, Mahmoud Medany, Daniel Ahmed

Powered by acoustics, existing therapeutic and diagnostic procedures will become less invasive and new methods will become available that have never been available before. Acoustic…

cond-mat.mtrl-sci2022★ 27 cited

Giant shape-memory effect in twisted ferroic nanocomposites

Donghoon Kim, Minsoo Kim, Steffen Reidt +7

The shape recovery ability of shape-memory alloys vanishes below a critical size (~50nm), which prevents their practical applications at the nanoscale. In contrast, ferroic materia…

cs.RO2022★ 28 cited

Dynamic Task Space Control Enables Soft Manipulators to Perform Real-World Tasks

Oliver Fischer, Yasunori Toshimitsu, Amirhossein Kazemipour +1

Dynamic motions are a key feature of robotic arms, enabling them to perform tasks quickly and efficiently. Soft continuum manipulators do not currently consider dynamic parameters…

physics.plasm-ph2021★ 53 cited

Reduced etch lag and high aspect ratios by deep reactive ion etching (DRIE)

M. S. Gerlt, N. F. Läubli, M. Manser +2

Deep reactive ion etching (DRIE) with the Bosch process is one of the key procedures used to manufacture micron-sized structures for MEMS and microfluidic applications in silicon a…