superconducting resonators 2aluminum surface treatment 1CMOS compatibility 1coplanar waveguide 1dielectric loss 1fabrication process 1oxide removal 1plasma passivation 1titanium nitride 1two-level system loss 1
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- Technical University of MunichDE4 papers
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- Fraunhofer Research Institution for Microsystems and Solid State TechnologiesDE2 papers
- Arizona State UniversityUS1 paper
- Bar-Ilan UniversityIL1 paper
- China University of Mining and TechnologyCN1 paper
- Defence Institute of Bio-Energy ResearchIN1 paper
- DEVCOM Army Research LaboratoryUS1 paper
- Frankfurt University of Applied SciencesDE1 paper
- Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma TechnologyDE1 paper
- FZU ‒ Institute of Physics of the Academy of Sciences of the Czech RepublicCZ1 paper
- German University in CairoEG1 paper
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quant-ph2026
Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele +10
The paper investigates how deposition conditions, etching power, and resist‑strip temperature influence the performance of superconducting titanium nitride coplanar waveguide reson…
quant-ph2026
Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication
Simon J. K. Lang, Ignaz Eisele, Alwin Maiwald +8
The paper studies surface treatment methods for aluminum superconducting resonators to maintain low dielectric loss after a 24‑hour ambient exposure, finding that selective oxide r…