CMOS compatibility 1coplanar waveguide 1fabrication process 1superconducting resonators 1titanium nitride 1two-level system loss 1
From the 1 of 3 linked papers with an AI index.
3 papers
cond-mat.mtrl-sci2026
Substrate-metal interface engineering enhances TaN/Ta thin film superconducting resonator performance
Moritz Singer, Harsh Gupta, Benedikt Schoof +6
Tantalum has been demonstrated as a promising material for superconducting qubits. However, comparatively little attention has been given to its nitrides. Tantalum nitride exhibits…
quant-ph2026
Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele +10
The paper investigates how deposition conditions, etching power, and resist‑strip temperature influence the performance of superconducting titanium nitride coplanar waveguide reson…
quant-ph2025
Wafer-Scale Characterization of Al/AlxOy/Al Josephson Junctions at Room Temperature
Simon J. K. Lang, Ignaz Eisele, Johannes Weber +13
Josephson junctions (JJs) are the key element of many devices operating at cryogenic temperatures. Development of time-efficient wafer-scale JJ characterization for process optimiz…