superconducting resonators 2aluminum surface treatment 1CMOS compatibility 1coplanar waveguide 1dielectric loss 1fabrication process 1oxide removal 1plasma passivation 1titanium nitride 1two-level system loss 1
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- Technical University of MunichDE4 papers
- RWTH Aachen UniversityDE3 papers
- DEVCOM Army Research LaboratoryUS2 papers
- Fraunhofer Research Institution for Microsystems and Solid State TechnologiesDE2 papers
- United States Army Combat Capabilities Development CommandUS2 papers
- Arizona State UniversityUS1 paper
- Bar-Ilan UniversityIL1 paper
- Centre National de la Recherche ScientifiqueFR1 paper
- China University of Mining and TechnologyCN1 paper
- Defence Institute of Bio-Energy ResearchIN1 paper
- Frankfurt University of Applied SciencesDE1 paper
- Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma TechnologyDE1 paper
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