Development of Yttrium alloy ion source and its application in nanofabrication

Nadezhda Kukharchyk, Ronna Neumann, Swetlana Mazarov +3

We present a new YAuSi Liquid Metal Alloy Ion Source (LMAIS), generating focused ion beams of yttrium ions, and its prospective applications for nanofabrication, sample preparation…