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physics.ins-det2020★ 11 cited
Boron Liquid Metal Alloy Ion Sources For Special FIB Applications
Lothar Bischoff, Nico Klingner, Paul Mazarov +2
Focused Ion Beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the…
physics.ins-det2016★ 3 cited
Development of Yttrium alloy ion source and its application in nanofabrication
Nadezhda Kukharchyk, Ronna Neumann, Swetlana Mazarov +3
We present a new YAuSi Liquid Metal Alloy Ion Source (LMAIS), generating focused ion beams of yttrium ions, and its prospective applications for nanofabrication, sample preparation…