11 citations · 19 across the 4 of their papers we have counts for
4 papers
Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams
M. Hollenbach, N. Klingner, P. Mazarov +8
Carbon implantation at the nanoscale is highly desired for the engineering of defect-based qubits in a variety of materials, including silicon, diamond, SiC and hBN. However, the l…
Roadmap for focused ion beam technologies
Katja Höflich, Gerhard Hobler, Frances I. Allen +29
The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was or…
Boron Liquid Metal Alloy Ion Sources For Special FIB Applications
Lothar Bischoff, Nico Klingner, Paul Mazarov +2
Focused Ion Beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the…
Development of Yttrium alloy ion source and its application in nanofabrication
Nadezhda Kukharchyk, Ronna Neumann, Swetlana Mazarov +3
We present a new YAuSi Liquid Metal Alloy Ion Source (LMAIS), generating focused ion beams of yttrium ions, and its prospective applications for nanofabrication, sample preparation…