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20132026
most citedThe influence of -mixing processes in collisions on atoms' populations in weakly ionized helium plasmas

8 citations

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physics.comp-ph2022★ 6 cited

Modeling Incomplete Conformality during Atomic Layer Deposition in High Aspect Ratio Structures

Luiz Felipe Aguinsky, Frâncio Rodrigues, Tobias Reiter +4

Atomic layer deposition allows for precise control over film thickness and conformality. It is a critical enabler of high aspect ratio structures, such as 3D NAND memory, since its…