6 citations · 6 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2026
Faulted loop nucleation and dopant activation in Al-implanted 4H-SiC
Sabine Leroch, Robert Stella, Andreas Hössinger +1
We present a molecular dynamics (MD) study of Al implantation in 4H-SiC to determine how implantation temperature and dose affect defect evolution and dopant activation during anne…
physics.comp-ph2022★ 6 cited
Modeling Incomplete Conformality during Atomic Layer Deposition in High Aspect Ratio Structures
Luiz Felipe Aguinsky, Frâncio Rodrigues, Tobias Reiter +4
Atomic layer deposition allows for precise control over film thickness and conformality. It is a critical enabler of high aspect ratio structures, such as 3D NAND memory, since its…