most citedModeling Incomplete Conformality during Atomic Layer Deposition in High Aspect Ratio Structures

6 citations · 6 across the 2 of their papers we have counts for

collaborators
Showing cond-mat.mtrl-sciShow all

1 paper · 1 filter

cond-mat.mtrl-sci2026

Faulted loop nucleation and dopant activation in Al-implanted 4H-SiC

Sabine Leroch, Robert Stella, Andreas Hössinger +1

We present a molecular dynamics (MD) study of Al implantation in 4H-SiC to determine how implantation temperature and dose affect defect evolution and dopant activation during anne…