228 citations · 276 across the 4 of their papers we have counts for
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physics.app-ph2017★ 33 cited
Superconducting Through-Silicon Vias for Quantum Integrated Circuits
Mehrnoosh Vahidpour, William O'Brien, Jon Tyler Whyland +12
We describe a microfabrication process for superconducting through-silicon vias appropriate for use in superconducting qubit quantum processors. With a sloped-wall via geometry, we…
physics.app-ph2017★ 14 cited
Superconducting Caps for Quantum Integrated Circuits
William O'Brien, Mehrnoosh Vahidpour, Jon Tyler Whyland +12
We report on the fabrication and metrology of superconducting caps for qubit circuits. As part of a 3D quantum integrated circuit architecture, a cap chip forms the upper half of a…