Laser Etch Enabled Active Embedded Microfluidic Cooling in $\beta$-Ga${}_2$O${}_3$

Shonkho Shuvro, Roopa Jayaramaiah, Rangarajan Muralidharan +2

We demonstrate active embedded microfluidic cooling in $\beta$-Ga${}_2$O${}_3$. We employ a cost-effective infra-red laser etch setup to achieve controlled etching of micro-channels in 500…