Room-temperature formation of Pt${}_3$Si/Pt${}_2$Si films on poly-Si substrates

V. P. Dubkov, S. A. Mironov, K. V. Chizh +1

We propose a way of formation of thin bilayer Pt${}_3$Si/Pt${}_2$Si films at room temperature on poly-Si substrates by Pt magnetron sputtering and wet etching, obtain such film, invest…