365 citations · 865 across the 3 of their papers we have counts for
Showing cond-mat.mes-hallShow all
2 papers · 1 filter
cond-mat.mes-hall2009★ 365 cited
Precision Cutting and Patterning of Graphene with Helium Ions
D. C. Bell, M. C. Lemme, L. A. Stern +2
We report nanoscale patterning of graphene using a helium ion microscope configured for lithography. Helium ion lithography is a direct-write lithography process, comparable to con…
cond-mat.mes-hall2003★ 174 cited
A Low-Temperature Atomic Layer Deposition Liftoff Method for Microelectronic and Nanoelectronic Applications
M. J. Biercuk, D. J. Monsma, C. M. Marcus +2
We report a novel method for depositing patterned dielectric layers with sub-micron features using atomic layer deposition (ALD). The patterned films are superior to sputtered or e…