365 citations · 865 across the 3 of their papers we have counts for
3 papers
cond-mat.mes-hall2009★ 365 cited
Precision Cutting and Patterning of Graphene with Helium Ions
D. C. Bell, M. C. Lemme, L. A. Stern +2
We report nanoscale patterning of graphene using a helium ion microscope configured for lithography. Helium ion lithography is a direct-write lithography process, comparable to con…
cond-mat.mes-hall2003★ 174 cited
A Low-Temperature Atomic Layer Deposition Liftoff Method for Microelectronic and Nanoelectronic Applications
M. J. Biercuk, D. J. Monsma, C. M. Marcus +2
We report a novel method for depositing patterned dielectric layers with sub-micron features using atomic layer deposition (ALD). The patterned films are superior to sputtered or e…
cond-mat.mtrl-sci1998★ 326 cited
Controlled Fabrication of Metallic Electrodes with Atomic Separation
A. F. Morpurgo, D. B. Robinson, C. M. Marcus
We report a new technique for fabricating metallic electrodes on insulating substrates with separations on the 1 nm scale. The fabrication technique, which combines lithographic an…