39 citations · 279 across the 16 of their papers we have counts for
16 papers
Grazing incidence X-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
Anna Andrle, Philipp Hönicke, Philipp Schneider +6
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Usi…
On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
Analía Fernández Herrero, Victor Soltwisch, Mika Pflüger +2
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive m…
Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures
Philipp Hönicke, Anna Andrle, Yves Kayser +6
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor…
The refined EUV mask model
I. A. Makhotkin, M. Wu, V. Soltwisch +2
A refined model of an extreme ultraviolet (EUV) mask stack consisting of the Mo/Si multilayer coated by a Ru protective layer and a TaBN/TaBO absorber layer was developed to facili…
A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence
K. V. Nikolaev, V. Soltwisch, P. Hoenicke +6
Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parame…
Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings
Analía Fernández Herrero, Mika Pflüger, Jürgen Probst +2
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexit…