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20062021
most citedReconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver

39 citations · 279 across the 16 of their papers we have counts for

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Showing 2011Show all

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physics.optics2011★ 3 cited

Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations

S. Burger, L. Zschiedrich, J. Pomplun +4

EUV scatterometry is performed on 3D patterns on EUV lithography masks. Numerical simulations of the experimental setup are performed using a rigorous Maxwell solver. Mask geometry…