39 citations · 279 across the 16 of their papers we have counts for
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physics.app-ph2018★ 8 cited
Characteristic diffuse scattering from distinct line roughnesses
Analía Fernández Herrero, Mika Pflüger, Frank Scholze +1
Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electr…
physics.app-ph2018★ 38 cited
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
Victor Soltwisch, Philipp Hönicke, Yves Kayser +4
The geometry of a SiN lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are u…