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20242026
most citedLiDAR 2.0: Hierarchical Curvy Waveguide Detailed Routing for Large-Scale Photonic Integrated Circuits

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cs.CV2024

GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask Generation

Haoyu Yang, Haoxing Ren

Inverse Lithography Technology (ILT) has emerged as a promising solution for photo mask design and optimization. Relying on multi-beam mask writers, ILT enables the creation of fre…