Electron-beam patterning of polymer electrolyte films to make multiple nanoscale gates for nanowire transistors

D. J. Carrad, A. M. Burke, R. W. Lyttleton +7

We report an electron-beam based method for the nanoscale patterning of the poly(ethylene oxide)/LiClO${}_4$ polymer electrolyte. We use the patterned polymer electrolyte as a high…