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20132023
most citedAdvanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits

253 citations · 751 across the 10 of their papers we have counts for

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cond-mat.supr-con2017★ 15 cited

Developments Toward a 250-nm, Fully Planarized Fabrication Process With Ten Superconducting Layers And Self-Shunted Josephson Junctions

Sergey K. Tolpygo, Vladimir Bolkhovsky, Ravi Rastogi +5

We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junc…