253 citations · 751 across the 10 of their papers we have counts for
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cond-mat.supr-con2014★ 172 cited
Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al-AlOx/Nb Josephson Junctions for VLSI Circuits
Sergey K. Tolpygo, Vladimir Bolkhovsky, Terence J. Weir +3
A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is…
cond-mat.supr-con2014★ 77 cited
Inductance of Circuit Structures for MIT LL Superconductor Electronics Fabrication Process with 8 Niobium Layers
Sergey K. Tolpygo, Vladimir Bolkhovsky, T. J. Weir +4
Inductance of superconducting thin-film inductors and structures with linewidth down to 250 nm has been experimentally evaluated. The inductors include various striplines and micro…