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20182023
most citedDAMO: Deep Agile Mask Optimization for Full Chip Scale

31 citations · 89 across the 13 of their papers we have counts for

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cs.OH2022

Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks

Haoyu Yang, Zongyi Li, Kumara Sastry +6

Lithography simulation is a critical step in VLSI design and optimization for manufacturability. Existing solutions for highly accurate lithography simulation with rigorous models…