Molecular Beam Epitaxy of Al${}_{1-\mathrm{x}}$Sc${}_{\mathrm{x}}$N Nanowires: Towards Group-III Nitride Piezoelectric Nanogenerators with Enhanced Response

Adriano Notarangelo, Rudeesun Songmuang, Mostafa Saleh +10

We study the molecular beam epitaxy of self-assembled Al${}_{1-\mathrm{x}}$Sc${}_{\mathrm{x}}$N nanowires on conductive TiN layers and demonstrate their application in piezoelectric na…