most citedAb-initio Study of the Trimethylaluminum Atomic Layer Deposition Process on Carbon Nanotubes - An Alternative Initial Step

4 citations · 9 across the 3 of their papers we have counts for

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cond-mat.mes-hall2017★ 3 cited

Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation

A. Förster, C. Wagner, S. Gemming +1

We present theoretical investigations of a k-restore process for damaged pourous ultra-low-k (ULK) materials. The process is based on plasma enhanced fragmented silylation precurso…

cond-mat.mes-hall2017★ 4 cited

Ab-initio Study of the Trimethylaluminum Atomic Layer Deposition Process on Carbon Nanotubes - An Alternative Initial Step

A. Förster, C. Wagner, J. Schuster +1

Electronic applications of carbon nanotubes (CNTs) require the deposition of dielectric films on the tubes while conserving their excellent electronic properties. In our density fu…