A Study of Monolithic CMOS Pixel Sensors Back-thinning and their Application for a Pixel Beam Telescope

Abstract

This paper reports results on a detailed study of charge collection and signal-to-noise performance of CMOS monolithic pixel sensors before and after back-thinning and their application in a pixel beam telescope for the ALS 1.5 GeV $e^{-}$ beam test facility.

6 pages, one figure, to appear on the proceedings of the the Sixth International "Hiroshima" Symposium on the Development and Application of Semiconductor Tracking Detectors, Carmel, CA, September, 2006

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