Extending Silicon Avalanche Photodetection Beyond $2\mu$m by Direct GeSn Integration

Abstract

Silicon avalanche photodiodes provide a technologically mature platform for sensitive photodetection, but their spectral response is intrinsically limited by the silicon bandgap. Extending their operation into the infrared requires the integration of narrow-bandgap absorbers while preserving efficient avalanche multiplication and compatibility with silicon processing. Here, we propose and demonstrate a monolithic approach that combines direct, buffer-free growth of GeSn on silicon with a lateral thin-junction separate-absorption-multiplication architecture. The GeSn layer, with a Sn composition reaching 6 at.%, extends optical absorption to a wavelength of $2.6\mu$m, while avalanche multiplication is spatially confined to an ion-implanted silicon lateral junction. This separation enables independent control of infrared absorption and carrier multiplication without the thick Ge virtual substrates conventionally used for GeSn epitaxy. GeSn-on-Si avalanche photodiodes exhibit low pre-breakdown dark current, stable breakdown at 72 V independent of device diameter, and clear infrared photoresponse extending beyond $2\mu$m. At 78 K, the devices exhibit external quantum efficiency exceeding 100%, reaching 163% at $1.55\mu$m, providing direct evidence of avalanche multiplication. These results establish direct integration of narrow-bandgap group-IV absorbers with silicon multiplication regions as a scalable strategy for extending the spectral reach of silicon avalanche photodetection, opening a route toward monolithic infrared detectors for sensing, imaging, communications, LiDAR, and quantum photonics