A non-invasive dry-transfer method for fabricating mesoscopic devices on sensitive materials

Abstract

Many materials with novel or exotic properties are highly sensitive to environmental factors such as air, solvents, and heat, which complicates device fabrication and limits their potential applications. Here, we present a universal submicron fabrication method for mesoscopic devices using a dry-transfer technique, tailored specifically for sensitive materials. This approach utilizes PMMA masks, combined with a water-dissoluble coating as a sacrificial layer, to ensure that sensitive materials are processed without exposure to harmful environmental conditions. The entire fabrication process is carried out in a glove box, employing dry techniques that avoid air, solvents, and heat exposure, culminating in an encapsulation step. We demonstrate the utility of this method by fabricating and characterizing K2Cr3As3 and WTe2 devices, a one- and two-dimensional material, respectively. The results show that our technique preserves the integrity of the materials, provides excellent contact interfaces, and is broadly applicable to a range of sensitive materials.

References in corpus (22)

• 2D materials and van der Waals heterostructures
• Boron nitride substrates for high-quality graphene electronics
• Two-dimensional materials from high-throughput computational exfoliation of experimentally known compounds
• Titanic Magnetoresistance in WTe2
• The hot pick-up technique for batch assembly of van der Waals heterostructures
• Fast pick up technique for high quality heterostructures of bilayer graphene and hexagonal boron nitride
• Néel-type skyrmion in WTe2/Fe3GeTe2 van der Waals heterostructure
• Gate-Tunable Negative Longitudinal Magnetoresistance in the Predicted Type-II Weyl Semimetal WTe2
• Superconductivity in quasi-one-dimensional K${}_2$Cr${}_3$As${}_3$ with significant electron correlations
• Drastic pressure effect on the extremely large magnetoresistance in WTe2: quantum oscillation study
• Unconventional superconductivity in quasi-one-dimensional Rb${}_2$Cr${}_3$As${}_3$
• Dry release transfer of graphene and few-layer h-BN by utilizing thermoplasticity of polypropylene carbonate for fabricating edge-contact-free van der Waals heterostructures
• NMR Investigation of the Quasi One-dimensional Superconductor K${}_2$Cr${}_3$As${}_3$
• Spin-Triplet Superconductivity in K2Cr3As3
• Anisotropic $H_{c2}$, thermodynamic and transport measurements, and pressure dependence of $T_c$ in K${}_2$Cr${}_3$As${}_3$ single crystals
• Multiband one-dimensional electronic structure and spectroscopic signature of Tomonoga-Luttinger liquid behavior in K${}_2$Cr${}_3$As${}_3$
• Cluster spin-glass ground state in quasi-one-dimensional KCr${}_3$As${}_3$
• Temperature and Angular Dependence of the Upper Critical Field in K${}_2$Cr${}_3$As${}_3$
• Observation of Raman active phonon with Fano lineshape in quasi-one-dimensional superconductor K${}_2$Cr${}_3$As${}_3$
• Scanning Tunneling Microscopy of an Air Sensitive Dichalcogenide Through an Encapsulating Layer
• Penetration depth measurements of K2Cr3As3 and Rb2Cr3As3
• Evidence of P-wave Pairing in K${}_2$Cr${}_3$As${}_3$ Superconductors from Phase-sensitive Measurement