In-situ Investigation of the Phase Formation and Superconductivity in VSi Thin Films at High Temperatures
arXiv:2412.04159 · doi:10.1016/j.apsusc.2025.162930
Abstract
Vanadium silicide (VSi) is a promising superconductor for integration with silicon-based electronics, however the interfacial growth kinetics have a strong influence on the resulting superconducting properties and are not yet fully understood. In this study, we have used neutron reflectometry to reveal the phase transformation during thin film growth driven by different annealing strategies. We examined the silicide formation when a thin layer of vanadium undergoes reactive diffusion with a silicon dioxide film on silicon at temperatures from 650-800 °C. To further investigate the time evolution of different phases under various annealing temperatures, a chemical model was developed and subsequent simulations were performed. The results of this model were validated using X-ray diffraction and cross-sectional TEM analysis. Correlations were observed between the structure and superconducting properties. Over-annealing films leads to complete depletion of the SiO barrier layer, forming diffuse interfaces and driving the formation of undesirable silicon-rich silicides. Avoiding this by controlling time and temperature, allows higher quality superconducting films to be achieved. The of the films was found to be 13 K, and the annealing conditions influenced the critical fields and the paramagnetic Meissner effect near . For optimally-annealed films, superconducting order parameters were calculated. Ginzberg-Landau theory was applied to explain flux penetration.
arXiv comment13 pages, 9 Figures
References in corpus (13)
- Superconducting Qubits: Current State of Play
- Fulde-Ferrell-Larkin-Ovchinnikov State in Heavy Fermion Superconductors
- Silicon quantum processor unit cell operation above one Kelvin
- The Future of Quantum Computing with Superconducting Qubits
- Universal quantum logic in hot silicon qubits
- Heat Conduction in the Vortex State of NbSe_2: Evidence for Multi-Band Superconductivity
- The Ginzburg-Landau Theory of Type II superconductors in magnetic field
- Superconductor-semiconductor hybrid cavity quantum electrodynamics
- The upper critical field of filamentary Nb3Sn conductors
- Giant Intrinsic Spin Hall Effect in WTa and other A15 Superconductors
- Physical properties of the non-centrosymmetric superconductor Nb0.18Re0.82
- Holographic Abrikosov lattice: vortex matter from black hole
- Surface structure and multigap superconductivity of V3Si (111) revealed by scanning tunneling microscopy