2 citations · 2 across the 2 of their papers we have counts for
3 papers
Hydrogen plasma-assisted atomic layer epitaxy of superconducting titanium nitride
Yi-Hsun Chen, Yin-Chun Huang, Zachary Degnan +10
Atomic layer deposition (ALD) offers precise, conformal control of thin-film growth and is a workhorse for semiconductor manufacturing, but its use in superconducting quantum circu…
Rutherford Backscattering Spectrometry analysis of the formation of superconducting VSi thin films
Fshatsion B. Gessesew, Manjith Bose, Kumaravelu Ganesan +2
Vanadium silicide, VSi, is a promising superconductor for silicon-based superconducting (SC) devices due to its compatibility with silicon substrates and its potential for inte…
In-situ Investigation of the Phase Formation and Superconductivity in VSi Thin Films at High Temperatures
Manjith Bose, David L. Cortie, Sergey Rubanov +3
Vanadium silicide (VSi) is a promising superconductor for integration with silicon-based electronics, however the interfacial growth kinetics have a strong influence on the res…